Taking a capacitor as a sensitive component, the mechanical displacement is converted into a capacitance change, and the displacement can be measured. The capacitance of a parallel plate capacitor is proportional to the plate area and inversely proportional to the plate spacing. A variable area capacitive sensor can be formed by a fixed plate and a movable plate. Changing the corresponding area of ​​the two plates, the capacitance of the sensor changes accordingly.
The capacitive grid displacement sensor is a capacitive sensor based on the variable area working principle, and the electrodes are arranged in a grid shape, which is equivalent to the parallel connection of a plurality of variable area capacitive sensors. The capacitive gate structure is shown in Figure 2.2.1. The stationary plate is a set of two equally spaced gates. The pole plates have the same pole pitch and the same grid width. When the moving plate moves relative to the fixed plate, the mechanical displacement changes into a change in the capacitance value, and the corresponding change in the electrical signal is obtained by circuit conversion.
An electronic digital scale used in physical experiments uses a multi-stage chip-type capacitive grid as shown in Figure 2.2.2 as a sensor. The multiple sets of grids of the movable ruler are connected in parallel to improve measurement accuracy and reduce sensor manufacturing accuracy. Requirements. During the moving process, the moving plate always forms a differential capacitor with different small electrodes. When the moving ruler moves relative to the fixed ruler, the capacitance cycle changes, and the generated pulse signal is converted into a displacement value by the circuit conversion amplification and the chip calculation, and is displayed.
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